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Electronics Tech Hub Seeks to Set Example for Green Semi Manufacturing

Imec developing virtual model that will demonstrate optimal processes for environmentally sustainable semiconductor manufacturing

www.designnews.com/, Mar. 21, 2023 – 

The semiconductor industry is a big user of resources such as electricity and water and utilizes potentially polluting materials such as chemicals on its production lines. As they look towards the future, more semiconductor companies are taking a long look at their environmental footprint, including their manufacturing processes, with an eye toward lower greenhouse gas emissions.

Imec, an R&D and innovation hub for nanoelectronic and digital technologies, is developing a model for green manufacturing. The company has initiated a project that seeks to develop a blueprint of sustainable semiconductor manufacturing techniques for key processes such as lithography and etching.

Related: There's a European CHIPS Act, Too

To achieve this, Imec has established a "virtual fab" to demonstrate its strategies to reduce the carbon footprint from semiconductor process steps. "We are working with pieces in the value chain to create a virtual fab," said Emily Gallagher, Principal Member of Technical Staff at Imec, in an interview with Design News. "We want to examine the environmental impact of different semiconductor process steps such as lithography.

The virtual fab involves a massive quantitative assessment of the environmental impact of patterning in advanced IC manufacturing. Using its imec.netzero modeling platform, Imec has quantified the environmental impact of patterning-related process steps for various logic technology nodes.

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