A New Home For Europe's Semiconductor Metrology

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Metrology is a fundamental aspect of semiconductor manufacturing, enabling precise measurements necessary for monitoring and controlling the quality of individual manufacturing steps. This article addresses a newly developed collaboration of Applied Materials and the Fraunhofer Institute for Photonic Microsystems IPMS to create the largest technology hub for semiconductor metrology in Europe.

www.azonano.com/, Aug. 23, 2023 – 

What is Semiconductor Metrology Analysis?

Semiconductor metrology analysis is a critical aspect of managing the semiconductor manufacturing process. With hundreds of steps involved in producing semiconductor wafers over a period of one to two months, early defects can lead to wasted efforts and resources. Metrology and inspection processes are strategically placed at critical points throughout the manufacturing process to ensure a certain yield and maintain quality.

Metrology involves precise measurements of various parameters on the semiconductor wafers, such as line width, hole diameter, and thin film thickness. These measurements, carried out using metrology equipment like CD-SEM and ellipsometers, ensure the accuracy and performance of the manufactured devices. If pattern measurements fall outside specified ranges, adjustments may be needed to ensure the circuit patterns transfer correctly.

Europe's Semiconductor Metrology Landscape

Europe has been at the forefront of technological advancements in various applications, including automotive, telecommunications, consumer electronics, and industrial automation, especially in the semiconductor industry, boasting numerous research institutions, chip manufacturers, and innovative startups.

Continuous investments in cutting-edge research and development are crucial to maintaining this competitive edge. Accurate metrology is essential for chipmakers to ensure the performance and reliability of their products while maintaining high yields. In this dynamic landscape, semiconductor metrology technologies are pivotal in driving innovation and fostering advancements.

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