The Fraunhofer IPMS offers various cooperation possibilities along the entire value chain to its customers. Feasibility studies are the first step if it is unclear at the beginning of a cooperation whether - and if so by what means - a customer request can be realized. For the basic proof of the functionality of a device or system demonstrators are realized within a development project. Especially in wafer-based processes, new technologies might be required which could be then developed in parallel. In the second step, the demonstrator turns into a prototype that fulfills all customer specifications. The Fraunhofer IPMS offers qualified pilot fabrication in its clean room for MEMS and other microsystem devices.

For the successful cooperation with our industrial customers, the Fraunhofer IPMS can draw on long-standing experience in various fields of research. With our service portfolio we can guarantee that our customers receive the appropriate solution for their purpose - whether it is a micromechanical device fabricated in our clean room or a complete system comprising optics, electronics and software in addition to the MEMS component.

Our Services Include

Research & Development

related to MEMS and nanoelectronics including the integration of the development results in application-oriented systems

Pilot Fabrication

The services offered by the Fabrication Department include: wafer processing; characterization and testing; assembly and interconnection technology; and coordination of external (third-party) services and supplier services.

300 mm Screening Fab Services

• Nanopatterning via E-Beam Lithography & Etch
  
• Atomic Layer Deposition (ALD)
  
• Chemical-Mechanical Planarization (CMP)
  
• 300 mm Wafer Cleaning & Removal
  
• 300 mm Copper (ECD-Cu) Plating

Research Fab Microelectronics Germany (FMD)